Richard Öchsner received the M.S. (Dipl.-Ing.) degree in Electrical Engineering and the Dr.-Ing. degree from the University of Erlangen. Since 1991 he is with the Fraunhofer Institute for Integrated Systems and Device Technology (IISB) in the department Semiconductor Manufacturing Equipment and Methods and leads the group manufacturing control and productivity. He has been engaged in microelectronics in the fields of contamination control in equipment, equipment control, integrated metrology, advanced process control, manufacturing optimisation as well as training and e-learning. He was and is involved in numerous national and international co-operative R&D projects in different functions. For example, he coordinates the European funded IST-project on e-learning for microelectronics manufacturing in which almost all major semiconductor manufactures participate.
Richard Öchsner
